2. 2.Relative molecular mass: 153.33
3. Physical& chemical properties
Colorless transparent fuming liquid with a strong pungent odor. Easily hydrolyzed in moist air to produce phosphoric acid and hydrochloric acid. Mp 1.25 ℃, boiling point 105.1 ℃, relative density was 1.675 g/ml. Evaporative heat 33.7kJ / mol. Keep stable when it’s close to 300 ℃,. Explode encountered plenty of water. Toxic and corrosive.
4. Application
Mainly used for chip N type doping, it's liquid source of phosphorus for integrated circuits, solar cells, optical fiber preform, separation devices, it's necessary electronic chemicals in chip manufacturing process.
5. Specifications
Item
Specification
w/（μg/kg）
Item
Specification
w/（μg/kg）
6N
7N
6N
7N
Al,max
20
5
Mn,max
20
1
Sb,max
10
3
Hg,max
10
5
As,max
15
6
Ni,max
10
1
Ba,max
10
1
Nb,max
2
1
Bi,max
10
1
K, max
20
3
Cd,max
10
3
Ag,max
1
1
Ca,max
20
5
Na,max
10
5
Cr,max
10
1
Sn,max
5
1
Co,max
10
1
Sr,max
5
1
Cu,max
20
2
Ti,max
5
2
Ga,max
1
1
V,max
10
2
Au,max
1
1
Zn,max
5
1
Fe,max
30
5
Assay（%）min
99.9
99.9
Pb,max
10
3
Purity w/%,min
99.999 9%
99.999 99%
Li,max
10
6
Chroma，/（APHA） max
5
5
Mg,max
10
5
Particles≥0.3μm max
50 p/ml
50 p/ml