
Electronic grade Phosphorus Oxychloride(POCl₃)
1. Chemical formula: POCl3
2. 2.Relative molecular mass: 153.33
3. Physical& chemical properties
Colorless transparent fuming liquid with a strong pungent odor. Easily hydrolyzed in moist air to produce phosphoric acid and hydrochloric acid. Mp 1.25 ℃, boiling point 105.1 ℃, relative density was 1.675 g/ml. Evaporative heat 33.7kJ / mol. Keep stable when it’s close to 300 ℃,. Explode encountered plenty of water. Toxic and corrosive.
4. Application
Mainly used for chip N type doping, it's liquid source of phosphorus for integrated circuits, solar cells, optical fiber preform, separation devices, it's necessary electronic chemicals in chip manufacturing process.
2. 2.Relative molecular mass: 153.33
3. Physical& chemical properties
Colorless transparent fuming liquid with a strong pungent odor. Easily hydrolyzed in moist air to produce phosphoric acid and hydrochloric acid. Mp 1.25 ℃, boiling point 105.1 ℃, relative density was 1.675 g/ml. Evaporative heat 33.7kJ / mol. Keep stable when it’s close to 300 ℃,. Explode encountered plenty of water. Toxic and corrosive.
4. Application
Mainly used for chip N type doping, it's liquid source of phosphorus for integrated circuits, solar cells, optical fiber preform, separation devices, it's necessary electronic chemicals in chip manufacturing process.
5. Specifications
Item |
Specification w/(μg/kg) |
Item |
Specification w/(μg/kg) |
||
6N | 7N | 6N | 7N | ||
Al,max | 20 | 5 | Mn,max | 20 | 1 |
Sb,max | 10 | 3 | Hg,max | 10 | 5 |
As,max | 15 | 6 | Ni,max | 10 | 1 |
Ba,max | 10 | 1 | Nb,max | 2 | 1 |
Bi,max | 10 | 1 | K, max | 20 | 3 |
Cd,max | 10 | 3 | Ag,max | 1 | 1 |
Ca,max | 20 | 5 | Na,max | 10 | 5 |
Cr,max | 10 | 1 | Sn,max | 5 | 1 |
Co,max | 10 | 1 | Sr,max | 5 | 1 |
Cu,max | 20 | 2 | Ti,max | 5 | 2 |
Ga,max | 1 | 1 | V,max | 10 | 2 |
Au,max | 1 | 1 | Zn,max | 5 | 1 |
Fe,max | 30 | 5 | Assay(%)min | 99.9 | 99.9 |
Pb,max | 10 | 3 | Purity w/%,min | 99.999 9% | 99.999 99% |
Li,max | 10 | 6 | Chroma,/(APHA) max | 5 | 5 |
Mg,max | 10 | 5 | Particles≥0.3μm max | 50 p/ml | 50 p/ml |